منابع مشابه
A Magnetic Sensor with Amorphous Wire
Using a FeCoSiB amorphous wire and a coil wrapped around it, we have developed a sensitive magnetic sensor. When a 5 mm long amorphous wire with the diameter of 0.1 mm was used, the magnetic field noise spectrum of the sensor was about 30 pT/ÖHz above 30 Hz. To show the sensitivity and the spatial resolution, the magnetic field of a thousand Japanese yen was scanned with the magnetic sensor.
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The first three-axis micro-force sensor with adjustable force range from ±20 μN to ±200 μN and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed...
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In this paper, we describe the design, fabrication and calibration results of a 6-degree of freedom force-moment micro sensing chip utilizing the piezoresistance effect in silicon. The sensing chip is designed to be able to simultaneously detect three components of force and three components of moment in three orthogonal directions. Conventional p-type and four-terminal p-type piezoresistors ha...
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An integrated multifunction micro-sensor for three-dimensional micro-force precision measurement under different pressure and temperature conditions is introduced in this paper. The integrated sensor consists of three kinds of sensors: a three-dimensional micro-force sensor, an absolute pressure sensor and a temperature sensor. The integrated multifunction micro-sensor is fabricated on silicon ...
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Fabrice F.C. Duval a,∗, Stephen A. Wilson a, Graham Ensell b, Nicolas M.P. Evanno c, Markys G. Cain d, Roger W. Whatmore a,1 a School of Industrial and Manufacturing Science, Cranfield University, Bedfordshire MK43 0AL, UK b INNOS Limited, Mountbatten Building, Highfield, Southampton, Hampshire SO17 1BJ, UK c Rolls-Royce Plc, Strategic Research Centre, Sina-28, P.O. Box 31, Derby DE24 8BJ, UK d...
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2017
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.131.1180